목록 Fabrication of GaN nanorods by inductively coupled plasma etching via SiO2 nanosphere Lithography 2013~ Author J. Kim, H. Jung, H. Y. Kim, J. Bang, J. Kim Journal Thin Solid Films Link https://www.sciencedirect.com/science/article/pii/S0040609009001576 345회 연결 517, 3859–3861