목록 Inductively coupled plasma etching of nano-patterned sapphire for flip-chip GaN light emitting diode applications 2013~ Author B.-J. Kim, M. A. Mastro, H. Jung, H.-Y. Kim, S. H. Kim, R. T. Holm, J. Hite, C. Jr. R. Eddy, J. Bang and J. Kim Journal Thin Solid Films Link https://www.sciencedirect.com/science/article/pii/S0040609008006019 429회 연결 516, 7744